Simoen, EddyEddySimoenBrugere, AntoineAntoineBrugereSatta, AlessandraAlessandraSattaVan Daele, BennyBennyVan DaeleBrijs, BertBertBrijsRichard, OlivierOlivierRichardGeypen, JefJefGeypenMeuris, MarcMarcMeurisVandervorst, WilfriedWilfriedVandervorst2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14470Solid-phase epitaxial regrowth of phosphorus implanted amorphized germaniumMeeting abstract