NiO thin films synthesized by atomic layer deposition using Ni(dmamb)2 and O3 as precursors

Peter, AntonyAntonyPeterToeller, MichaelMichaelToellerAdelmann, ChristophChristophAdelmannMeersschaut, JohanJohanMeersschautFranquet, AlexisAlexisFranquetRichard, OlivierOlivierRichardTielens, HildeHildeTielensBrijs, BertBertBrijsMoussa, AlainAlainMoussaConard, ThierryThierryConardBender, HugoHugoBenderSchaekers, MarcMarcSchaekersKittl, JorgeJorgeKittlJurczak, GosiaGosiaJurczakVan Elshocht, SvenSvenVan Elshocht2021-10-202021-10-2020120948-1907https://imec-publications.be/handle/20.500.12860/21284NiO thin films synthesized by atomic layer deposition using Ni(dmamb)2 and O3 as precursorsJournal article10.1002/cvde.201106949