Francis, LaurentLaurentFrancisPan, WanlingWanlingPanGeuens, CarolineCarolineGeuensKromka, AlexanderAlexanderKromkaTilmans, HarrieHarrieTilmansSteinmueller-Nethl, DorisDorisSteinmueller-NethlVan Hoof, ChrisChrisVan Hoof2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10464Theoretical investigation of nanocrystalline diamond thin film bulk acoustic resonators (FBAR) for mass sensing applicationsProceedings paper