Delabie, AnneliesAnneliesDelabie2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/35020Growth mechanisms and selectivity during atomic layer depositionMeeting abstracthttps://ald2020.avs.org/wp-content/uploads/2020/02/Annelies-Delabie-Tutorial-2020.pdf