Vandeweyer, TomTomVandeweyerAltamirano Sanchez, EfrainEfrainAltamirano SanchezVangoidsenhoven, DizianaDizianaVangoidsenhovenMurdoch, GayleGayleMurdochGroenendijk, RemcoRemcoGroenendijkHepp, BirgittBirgittHeppMos, EvertEvertMosFinders, JoJoFindersVleeming, BertBertVleemingDusa, MirceaMirceaDusaMaenhoudt, MireilleMireilleMaenhoudt2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16435Spacer self aligned double patterning: process controlOral presentation