Pulsed CVD/ALD of amorphous GeSe for application as OTS selector

Haider, AliAliHaiderCaymax, MattyMattyCaymaxDeng, ShaorenShaorenDengSchapmans, ElieElieSchapmansMaes, JanJanMaesGirard, Jean-MarcJean-MarcGirardKar, Gouri SankarGouri SankarKarEl Hajjam, Gabriel KhalilGabriel KhalilEl HajjamGoux, LudovicLudovicGouxDelhougne, RomainRomainDelhougne2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33081Pulsed CVD/ALD of amorphous GeSe for application as OTS selectorMeeting abstracthttps://www.eurocvd-balticald2019.lu/programme/detailed-programme/day-4-june-27-2019/