Stress-induced leakage current in ultrathin SiO2 layers and the hydrogen dispersive transport model

Houssa, MichelMichelHoussaStesmans, AndreAndreStesmansCarter, RichardRichardCarterHeyns, MarcMarcHeyns2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5354Stress-induced leakage current in ultrathin SiO2 layers and the hydrogen dispersive transport modelJournal article