Provoost, JanJanProvoostVan der Plas, GeertGeertVan der PlasMarchal, PolPolMarchal2021-10-182021-10-182010-071363-5182https://imec-publications.be/handle/20.500.12860/17848SmartSamples – Lowering integration risks for 3D TSV productsJournal articlehttp://www.future-fab.com/content/PDF/FF34_L_WP_Provoost_DIPI.pdf