Heyns, MarcMarcHeynsBender, HugoHugoBenderCarter, RichardRichardCarterCaymax, MattyMattyCaymaxConard, ThierryThierryConardDe Gendt, StefanStefanDe GendtDegraeve, RobinRobinDegraeveDe Witte, HildeHildeDe WitteGroeseneken, GuidoGuidoGroesenekenHaukka, S.S.HaukkaHenson, KirklenKirklenHensonHoussa, MichelMichelHoussaKubicek, StefanStefanKubicekMaes, GuidoGuidoMaesNaili, MohamedMohamedNailiNohira, HiroshiHiroshiNohiraTsai, WilmanWilmanTsaiTuominen, MarkoMarkoTuominenVandervorst, WilfriedWilfriedVandervorstWilhelm, RudiRudiWilhelmYang, E.E.YangZhao, ChaoChaoZhao2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5342High k dielectric materials prepared by atomic layer CVDOral presentation