Controlling STI-related parasitic conduction in 90nm CMOS and below

Augendre, EmmanuelEmmanuelAugendreRooyackers, RitaRitaRooyackersShamiryan, DenisDenisShamiryanRavit, ClaireClaireRavitJurczak, GosiaGosiaJurczakBadenes, GonçalGonçalBadenes2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/5970Controlling STI-related parasitic conduction in 90nm CMOS and belowProceedings paper