High-k gate dielectrics on Ge(100): effective electrical passivation using germanium oxide

Delabie, AnneliesAnneliesDelabieBellenger, FlorenceFlorenceBellengerHoussa, MichelMichelHoussaConard, ThierryThierryConardVan Elshocht, SvenSvenVan ElshochtCaymax, MattyMattyCaymaxHeyns, MarcMarcHeynsMeuris, MarcMarcMeuris2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12036High-k gate dielectrics on Ge(100): effective electrical passivation using germanium oxideProceedings paper