Pathangi Sriraman, HariHariPathangi SriramanMallik, ArindamArindamMallikChan, BTBTChanVaid, VarunVarunVaidVandenbroeck, NadiaNadiaVandenbroeckLi, JinJinLiHong, Sung EunSung EunHongGronheid, RoelRoelGronheid2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25743Towards cost-effective and low defectivity DSA flows for line/space patterningProceedings paper