Electronic transport properties of polycrystalline silicon films deposited on ceramic substrates

Bourdais, S.S.BourdaisBeaucarne, GuyGuyBeaucarnePoortmans, JefJefPoortmansSlaoui, A.A.Slaoui2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3265Electronic transport properties of polycrystalline silicon films deposited on ceramic substratesJournal article