Velenis, DimitriosDimitriosVelenisStucchi, MicheleMicheleStucchiMarinissen, Erik JanErik JanMarinissenBeyne, EricEricBeyne2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16449Impact of design choices on 3D SiC manufacturing costOral presentationhttp://www.date-conference.com/files/file/09-workshops/date09-3dws-digestv2-090504.pdf