Role of hydrogen in separation of porous Si layer in late transfer process

Bilyalov, RenatRenatBilyalovSolanki, Chetan SinghChetan SinghSolankiPoortmans, JefJefPoortmansUlyashin, A.A.UlyashinJob, R.R.JobFahrner, W.W.Fahrner2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6028Role of hydrogen in separation of porous Si layer in late transfer processOral presentation