Epitaxial Ge-on-nothing virtual substrates for 3D device stacking technologies

Loo, RogerRogerLooPorret, ClémentClémentPorretHan, HanHanHanDepauw, ValerieValerieDepauw2021-10-292021-10-292020-07https://imec-publications.be/handle/20.500.12860/35503Epitaxial Ge-on-nothing virtual substrates for 3D device stacking technologiesMeeting abstracthttps://ecs.confex.com/ecs/prime2020/meetingapp.cgi/Paper/136840