FinFET patterning process challenges

Altamirano Sanchez, EfrainEfrainAltamirano SanchezCollaert, NadineNadineCollaert2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/21965FinFET patterning process challengesMeeting abstracthttp://ma.ecsdl.org/content/MA2013-01/20/863.abstract