Loo, RogerRogerLooShimura, YosukeYosukeShimuraIke, ShinichiShinichiIkeVohra, AnuragAnuragVohraStoica, TomaTomaStoicaStange, DanielaDanielaStangeBuca, DanDanBucaKohen, DavidDavidKohenMargetis, JoeJoeMargetisTolle, JohnJohnTolle2021-10-252021-10-2520180268-1242https://imec-publications.be/handle/20.500.12860/31234Epitaxial GeSn: Impact of process conditions on material qualityJournal articlehttps://doi.org/10.1088/1361-6641/aae2f9