Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves

Urbanowicz, AdamAdamUrbanowiczMeshman, BorisBorisMeshmanSchneider, DieterDieterSchneiderBaklanov, MikhaïlMikhaïlBaklanov2021-10-172021-10-1720080031-8965https://imec-publications.be/handle/20.500.12860/14588Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic wavesJournal article