An integrated optic ethanol vapor sensor based on a silicon-on-insulator microring resonator coated with a porous ZnO film

Yebo, Nebiyu A.Nebiyu A.YeboLommens, PetraPetraLommensHens, ZegerZegerHensBaets, RoelRoelBaets2021-10-192021-10-1920101094-4087https://imec-publications.be/handle/20.500.12860/18395An integrated optic ethanol vapor sensor based on a silicon-on-insulator microring resonator coated with a porous ZnO filmJournal article