SiGe band-to-band tunneling calibration based on p-i-n diodes: fabrication, measurement and simulation

Kao, FrankFrankKaoVerhulst, AnneAnneVerhulstRooyackers, RitaRitaRooyackersHikavyy, AndriyAndriyHikavyyLoo, RogerRogerLooMilenin, AlexeyAlexeyMileninTolle, JohnJohnTolleDekkers, HaroldHaroldDekkersSimoen, EddyEddySimoenMachkaoutsan, VladimirVladimirMachkaoutsanMaes, JanJanMaesDe Meyer, KristinKristinDe MeyerCollaert, NadineNadineCollaertHeyns, MarcMarcHeynsHuyghebaert, CedricCedricHuyghebaertThean, AaronAaronThean2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20900SiGe band-to-band tunneling calibration based on p-i-n diodes: fabrication, measurement and simulationMeeting abstract