Silicon carrier-depletion-based mach-zehnder and ring modulators with different doping patterns for telecommunication and optical interconnect

Yu, HuiHuiYuPantouvaki, MariannaMariannaPantouvakiVan Campenhout, JorisJorisVan CampenhoutKomorowska, KatarzynaKatarzynaKomorowskaDumon, PieterPieterDumonVerheyen, PeterPeterVerheyenLepage, GuyGuyLepageAbsil, PhilippePhilippeAbsilKorn, DietmarDietmarKornHillerkuss, DavidDavidHillerkussLeuthold, JuergJuergLeutholdBaets, RoelRoelBaetsBogaerts, WimWimBogaerts2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21902Silicon carrier-depletion-based mach-zehnder and ring modulators with different doping patterns for telecommunication and optical interconnectProceedings paper