Thermal stability of supercritical thickness-strained Si layers on thin strain-relaxed buffers

Escobedo-Cousin, E.E.Escobedo-CousinOlsen, S.H.S.H.OlsenDobrosz, P.P.DobroszBull, S.J.S.J.BullO'Neill, A.G.A.G.O'NeillCoulson, H.H.CoulsonClaeys, CorCorClaeysLoo, RogerRogerLooDelhougne, RomainRomainDelhougneCaymax, MattyMattyCaymax2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12131Thermal stability of supercritical thickness-strained Si layers on thin strain-relaxed buffersJournal article