Ernur, DidemDidemErnurTerzieva, ValentinaValentinaTerzievaWu, WenWenWuBrongersma, SywertSywertBrongersmaMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8890Corrosion of narrow copper damascene interconnectsJournal article