Processing active devices on Si interposer and impact on cost

Velenis, DimitriosDimitriosVelenisDetalle, MikaelMikaelDetalleHellings, GeertGeertHellingsScholz, MirkoMirkoScholzMarinissen, Erik JanErik JanMarinissenVan der Plas, GeertGeertVan der PlasLa Manna, AntonioAntonioLa MannaMiller, AndyAndyMillerLinten, DimitriDimitriLintenBeyne, EricEricBeyne2021-10-232021-10-232015https://imec-publications.be/handle/20.500.12860/26116Processing active devices on Si interposer and impact on costProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7334620