Hybrid analytical model for transduction efficiencies of electrostatically transduced bulk mode resonators

Stoffels, SteveSteveStoffelsPuers, BobBobPuersMertens, RobertRobertMertensTilmans, HarrieHarrieTilmans2021-10-172021-10-172008-09https://imec-publications.be/handle/20.500.12860/14519Hybrid analytical model for transduction efficiencies of electrostatically transduced bulk mode resonatorsProceedings paper