Fabrication and room temperature characterization of trilayer junctions for the development of 300 mm compatible superconducting qubits

Wan, DannyDannyWanCouet, SebastienSebastienCouetPiao, XiaoyuXiaoyuPiaoSouriau, LaurentLaurentSouriauTsvetanova, DianaDianaTsvetanovaVangoidsenhoven, DizianaDizianaVangoidsenhovenThiam, ArameArameThiamPacco, AntoineAntoinePaccoPotocnik, AntonAntonPotocnikMongillo, MassimoMassimoMongilloIvanov, TsvetanTsvetanIvanovJussot, JulienJulienJussotVerjauw, JeroenJeroenVerjauwAcharya, RohithRohithAcharyaHeijlen, JeroenJeroenHeijlenDonadio, Gabriele LucaGabriele LucaDonadioGovoreanu, BogdanBogdanGovoreanuLazzarino, FredericFredericLazzarinoRadu, IulianaIulianaRadu2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/36299Fabrication and room temperature characterization of trilayer junctions for the development of 300 mm compatible superconducting qubitsMeeting abstracthttps://confit.atlas.jp/guide/event/ssdm2020/subject/I-4-03/advanced