Lesniewska, AlicjaAlicjaLesniewskaWu, ChenChenWuJourdan, NicolasNicolasJourdanBriggs, BasoeneBasoeneBriggsBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokeiCroes, KristofKristofCroes2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26892Impact of Mn-based barriers on dielectric breakdown voltage and capacitanceMeeting abstract