Compressive stress relaxation through buckling on a low-k polymer-thin cap layer system

Iacopi, FrancescaFrancescaIacopiBrongersma, SywertSywertBrongersmaMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7675Compressive stress relaxation through buckling on a low-k polymer-thin cap layer systemJournal article