Li, ZilanZilanLiSchram, TomTomSchramWitters, ThomasThomasWittersCho, Hag-JuHag-JuChoO'Sullivan, BarryBarryO'SullivanYamada, NaokiNaokiYamadaTsunoda, TakaakiTakaakiTsunodaHooker, JacobJacobHookerDe Gendt, StefanStefanDe GendtDe Meyer, KristinKristinDe Meyer2021-10-172021-10-1720080013-4651https://imec-publications.be/handle/20.500.12860/14034Investigation on molybdenum and its conductive oxides as p-type metal gate candidatesJournal article