Petry, JasmineJasminePetryVandervorst, WilfriedWilfriedVandervorstBlasco, X.X.Blasco2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9420Effect of N2 anneal on thin HfO2 layers studied by C-AFMJournal article