Nanofabrication of sharp conductive diamond tip probe chips and their application in reverse tip sample scanning probe microscopy

Wouters, L.L.WoutersCho, J.J.ChoGim, S.S.GimYang, J.J.YangKanniainen, A.A.KanniainenLee, K.K.LeeLagrain, P.P.LagrainPeric, N.N.PericHantschel, T.T.Hantschel2025-07-182025-07-182025-SEPWOS:001527042000001https://imec-publications.be/handle/20.500.12860/45912Nanofabrication of sharp conductive diamond tip probe chips and their application in reverse tip sample scanning probe microscopyJournal article10.1016/j.mne.2025.100307WOS:001527042000001RESOLUTIONSILICON