Optimization of Al2O3 based VARIOT engineered tunnel dielectric for floating gate flash scaling

Blomme, PieterPieterBlommeDe Vos, JoeriJoeriDe VosVan Houdt, JanJanVan Houdt2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15008Optimization of Al2O3 based VARIOT engineered tunnel dielectric for floating gate flash scalingProceedings paper