Matsuki, K.K.MatsukiMatsuzaki, M.M.MatsuzakiYoneoka, M.M.YoneokaTsunoda, I.I.TsunodaTakakura, KenichiroKenichiroTakakuraSimoen, EddyEddySimoenVeloso, AnabelaAnabelaVelosoClaeys, CorCorClaeys2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28946Study of degradation mechanism by isothermal annealing of SOI FinFET after electron irradiationProceedings paper