Beernaert, R.R.BeernaertPodprocky, TomasTomasPodprockyDe Coster, JeroenJeroenDe CosterWitvrouw, AnnAnnWitvrouwHaspeslagh, LucLucHaspeslaghAvci, AykutAykutAvciDe Smet, JelleJelleDe SmetDe Smet, HerbertHerbertDe Smet2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/14964Novel micromirror design with variable pull-in voltageOral presentation