Claeys, CorCorClaeysSimoen, EddyEddySimoenPut, SofieSofiePutGiusi, G.G.GiusiCrupi, F.F.Crupi2021-10-172021-10-1720080038-1101https://imec-publications.be/handle/20.500.12860/13537Impact strain engineering on gate stack quality and reliabilityJournal article