Unusual modification of CuCl or CuBr films by He plasma exposure resulting in nanowire formation

Dictus, DriesDriesDictusBaklanov, MikhaïlMikhaïlBaklanovPikulev, VitalyVitalyPikulevDe Gendt, StefanStefanDe GendtVinckier, ChrisChrisVinckierBoullart, WernerWernerBoullartVanhaelemeersch, SergeSergeVanhaelemeersch2021-10-182021-10-1820100743-7463https://imec-publications.be/handle/20.500.12860/17025Unusual modification of CuCl or CuBr films by He plasma exposure resulting in nanowire formationJournal article