Hikavyy, AndriyAndriyHikavyyZyulkov, IvanIvanZyulkovLoo, RogerRogerLoo2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25387An investigation of disilane-digermane precursors combination for low temperature SiGe epitaxyProceedings paper