Pozo, J.J.PozoKumar, P.P.KumarLo Cascio, D.M.R.D.M.R.Lo CascioKhanna, AmitAmitKhannaDumon, PieterPieterDumonDelbeke, DanaƫDanaƫDelbekeBaets, RoelRoelBaetsFournier, M.M.FournierFedeli, J.M.J.M.FedeliFulbert, L.L.FulbertZimmermann, L.L.ZimmermannTillack, B.B.TillackTian, H.H.TianAalto, T.T.AaltoO'Brien, P.P.O'BrienDeptuck, D.D.DeptuckXu, J.J.XuZhang, X.X.ZhangGale, D.D.Gale2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21332ESSenTIAL : EPIXfab services specifically targeting (SME) industrial takeup of advanced silicon photonicsProceedings paper