Cleaning and strip requirements for metal gate based CMOS integration

Schram, TomTomSchramSebaai, FaridFaridSebaaiClaes, MartineMartineClaesVos, RitaRitaVosWada, MasayukiMasayukiWadaAlbert, JohanJohanAlbertRohr, ErikaErikaRohrKubicek, StefanStefanKubicek2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16179Cleaning and strip requirements for metal gate based CMOS integrationProceedings paper