Imaging impact of multilayer tuning in EUV masks, experimental validation

Philipsen, VickyVickyPhilipsenHendrickx, EricEricHendrickxVerduijn, ErikErikVerduijnRaghunathan, SudharSudharRaghunathanWood, ObertObertWoodSoltwisch, VictorVictorSoltwischScholze, FrankFrankScholzeDavydova, NataliaNataliaDavydovaMangat, PawitterPawitterMangat2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24385Imaging impact of multilayer tuning in EUV masks, experimental validationProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1918462