Optical and structural analysis of n-type polysilicon films formed by aluminium induced crystallization

Tüzün, ÖzgeÖzgeTüzünSlaoui, A.A.SlaouiGordon, IvanIvanGordonFocsa, A.A.FocsaJomard, F.F.JomardBallutaud, D.D.BallutaudMaurice, C.C.MauriceBeaucarne, GuyGuyBeaucarnePoortmans, JefJefPoortmans2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14585Optical and structural analysis of n-type polysilicon films formed by aluminium induced crystallizationProceedings paper