Wafer and simulations study comparing 5 LELE decomposition algorithms for both compliant and non-compliant lay-outs

Fenger, GermainGermainFengerLa Cour, PatPatLa CourTritchkov, AlexAlexTritchkovKomirenko, SergiySergiyKomirenkoWiaux, VincentVincentWiaux2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15299Wafer and simulations study comparing 5 LELE decomposition algorithms for both compliant and non-compliant lay-outsProceedings paper