Reduced-Order Stochastic Testing of Interconnects Subject to Line Edge Roughness

Huynen, MartijnMartijnHuynenWaeytens, RubenRubenWaeytensBosman, DriesDriesBosmanGossye, MichielMichielGossyeRogier, HendrikHendrikRogierVande Ginste, DriesDriesVande Ginste2024-06-042023-07-272024-06-0420232475-9481WOS:001017586100025https://imec-publications.be/handle/20.500.12860/42200Reduced-Order Stochastic Testing of Interconnects Subject to Line Edge RoughnessProceedings paper10.1109/SPI57109.2023.10145572979-8-3503-3282-7WOS:001017586100025UNCERTAINTY QUANTIFICATION