Nanoprober-based EBIC measurements for nanowire transistor structures

Arstila, KaiKaiArstilaHantschel, ThomasThomasHantschelSchulze, AndreasAndreasSchulzeVandooren, AnneAnneVandoorenVerhulst, AnneAnneVerhulstRooyackers, RitaRitaRooyackersEyben, PierrePierreEybenVandervorst, WilfriedWilfriedVandervorst2021-10-212021-10-2120130167-9317https://imec-publications.be/handle/20.500.12860/21987Nanoprober-based EBIC measurements for nanowire transistor structuresJournal article