Vereecke, BartBartVereeckevan der Veen, MarleenMarleenvan der VeenBarbarin, YohanYohanBarbarinMasahito, SugiuraSugiuraMasahitoKashiwagi, YusakuYusakuKashiwagiCott, DaireDaireCottHuyghebaert, CedricCedricHuyghebaertTokei, ZsoltZsoltTokei2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21774Characterization of carbon nanotubes based vertical interconnectsProceedings paper