Palmans, RogerRogerPalmansMouroux, AlietteAlietteMourouxZhang, S. L.S. L.ZhangPetersson, S.S.PeterssonMaex, KarenKarenMaex2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/811Stress Reduction in Tungsten CVD Films by RTA Post-Treatment of Ti/TiN Bilayers in AmmoniaOral presentation