TOFSIMS as a monitor for thin film growth

Conard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorstPétry, JasmineJasminePétryZhao, ChaoChaoZhaoBesling, WimWimBeslingNohira, HiroshiHiroshiNohiraRichard, OlivierOlivierRichard2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5163TOFSIMS as a monitor for thin film growthOral presentation