Evidence of a new degradation mechanism in high-k dielectrics at elevated temperatures

Sahhaf, SaharSaharSahhafDegraeve, RobinRobinDegraeveO'Connor, RobertRobertO'ConnorKaczer, BenBenKaczerZahid, MohammedMohammedZahidRoussel, PhilippePhilippeRousselPantisano, LuigiLuigiPantisanoGroeseneken, GuidoGuidoGroeseneken2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16148Evidence of a new degradation mechanism in high-k dielectrics at elevated temperaturesProceedings paper