Synergy of phosphorus diffusion and hydrogenation in multicrystalline silicon wafers and cells

Martinuzzi, S.S.MartinuzziPérichaud, I.I.PérichaudDe Wolf, StefaanStefaanDe WolfWarchol, F.F.Warchol2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6588Synergy of phosphorus diffusion and hydrogenation in multicrystalline silicon wafers and cellsProceedings paper